Method and system of image-forming multi-electron beams | Patent Publication Number 20240096586
US 20240096586 A1Patent NumberUS 12165831 B2
Application Number17829230
Filled DateMay 31, 2022
Priority DateMay 31, 2022
Publication DateMar 21, 2024
Original AssigneeKla Corporation
Current AssigneeKla Corporation
Inventor/ApplicantsXinrong Jiang
Xinrong JIANG
Ralph NYFFENEGGER
Christopher SEARS
Youfei Jiang
Ralph Nyffenegger
Michael Steigerwald
Christopher Sears
Jeong Ho Lee
Youfei JIANG
Jeong Ho LEE
Michael STEIGERWALD
Sameet K. SHRIYAN
Sameet K. Shriyan
Xinrong JIANG
Ralph NYFFENEGGER
Christopher SEARS
Youfei Jiang
Ralph Nyffenegger
Michael Steigerwald
Christopher Sears
Jeong Ho Lee
Youfei JIANG
Jeong Ho LEE
Michael STEIGERWALD
Sameet K. SHRIYAN
Sameet K. Shriyan
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