Method and system of image-forming multi-electron beams | Patent Application Number 17829230

17829230
Not Appealed
Patent NumberUS 12165831 B2
Publication NumberUS 20240096586 A1
Filled DateMay 31, 2022
Priority DateMay 31, 2022
Inventor/ApplicantsXinrong Jiang
Xinrong JIANG
Ralph NYFFENEGGER
Christopher SEARS
Youfei Jiang
Ralph Nyffenegger
Michael Steigerwald
Christopher Sears
Jeong Ho Lee
Youfei JIANG
Jeong Ho LEE
Michael STEIGERWALD
Sameet K. SHRIYAN
Sameet K. Shriyan
Examines-
Art Unit0
Technology Center0
Assignments
Kla Corporation
Current
Kla Corporation
Original
Law Firm
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