Method and system of image-forming multi-electron beams | Patent Number 12165831

US 12165831 B2
Application Number17829230
Publication NumberUS 20240096586 A1
Pendency2 years, 6 months, 14 days
Filled DateMay 31, 2022
Priority DateMay 31, 2022
Publication DateMar 21, 2024
Expiration DateMay 30, 2042
Inventor/ApplicantsXinrong Jiang
Xinrong JIANG
Ralph NYFFENEGGER
Christopher SEARS
Youfei Jiang
Ralph Nyffenegger
Michael Steigerwald
Christopher Sears
Jeong Ho Lee
Youfei JIANG
Jeong Ho LEE
Michael STEIGERWALD
Sameet K. SHRIYAN
Sameet K. Shriyan
Examines-
Art Unit0
Technology Center0
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Kla Corporation
Current
Kla Corporation
Original
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