Electrode for plasma processing apparatus and plasma processing apparatus | Patent Publication Number 20220344127
US 20220344127 A1Patent NumberUS 12165850 B2
Application Number17720359
Filled DateApr 14, 2022
Priority DateApr 14, 2022
Publication DateOct 27, 2022
Original AssigneeTokyo Electron Limited
Current AssigneeTokyo Electron Limited
Inventor/ApplicantsTakaki KOBUNE
Takaki Kobune
Takaki Kobune
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