Electrode for plasma processing apparatus and plasma processing apparatus | Patent Application Number 17720359

17720359
Not Appealed
Patent NumberUS 12165850 B2
Publication NumberUS 20220344127 A1
Filled DateApr 14, 2022
Priority DateApr 14, 2022
Inventor/ApplicantsTakaki KOBUNE
Takaki Kobune
Examines-
Art Unit0
Technology Center0
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
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