Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the same | Patent Publication Number 20220037215
US 20220037215 A1Patent NumberUS 12165933 B2
Application Number17180343
Filled DateFeb 19, 2021
Priority DateFeb 19, 2021
Publication DateFeb 3, 2022
Original AssigneeSamsung Electronics
Current AssigneeSamsung Electronics
Inventor/ApplicantsJunbum Park
Inkeun Baek
Suhwan Park
Namil KOO
Inkeun BAEK
Namil Koo
Junbum PARK
Suhwan PARK
Inkeun Baek
Suhwan Park
Namil KOO
Inkeun BAEK
Namil Koo
Junbum PARK
Suhwan PARK
Empower your practice with Patexia Publication Prosecution IP Module.
Get access to our exclusive rankings and unlock powerful data.
Looking for a Publication Attorney?
Get in touch with our team or create your account to start exploring a
network of over 120K attorneys.