Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the same | Patent Application Number 17180343

17180343
Not Appealed
Patent NumberUS 12165933 B2
Publication NumberUS 20220037215 A1
Filled DateFeb 19, 2021
Priority DateFeb 19, 2021
Inventor/ApplicantsJunbum Park
Inkeun Baek
Suhwan Park
Namil KOO
Inkeun BAEK
Namil Koo
Junbum PARK
Suhwan PARK
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Samsung Electronics
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Samsung Electronics
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