Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the same | Patent Number 12165933

US 12165933 B2
Application Number17180343
Publication NumberUS 20220037215 A1
Pendency3 years, 9 months, 25 days
Filled DateFeb 19, 2021
Priority DateFeb 19, 2021
Publication DateFeb 3, 2022
Expiration DateFeb 18, 2041
Inventor/ApplicantsJunbum Park
Inkeun Baek
Suhwan Park
Namil KOO
Inkeun BAEK
Namil Koo
Junbum PARK
Suhwan PARK
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Samsung Electronics
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Samsung Electronics
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