Optical systems and methods of characterizing high-k dielectrics | Patent Publication Number 20220003678

US 20220003678 A1

Patent NumberUS 11808706 B2

Application Number17147371

Filled DateJan 12, 2021

Priority DateSep 3, 2015

Publication DateJan 6, 2022

Original AssigneeCalifornia Institute Of Technology

Current AssigneeCalifornia Institute Of Technology

Inventor/ApplicantsPhilippe C. Adell
Harry A. Atwater

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