Optical systems and methods of characterizing high-k dielectrics | Patent Number 11808706

US 11808706 B2
Application Number17147371
Publication NumberUS 20220003678 A1
Pendency2 years, 9 months, 29 days
Filled DateJan 12, 2021
Priority DateSep 3, 2015
Publication DateJan 6, 2022
Expiration DateSep 2, 2035
Inventor/ApplicantsPhilippe C. Adell
Harry A. Atwater
ExaminesMALEVIC, DJURA
Art Unit2884
Technology Center2800
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