Optical systems and methods of characterizing high-k dielectrics | Patent Number 11808706
US 11808706 B2Filled DateJan 12, 2021
Priority DateSep 3, 2015
Publication DateJan 6, 2022
Expiration DateSep 2, 2035
Inventor/ApplicantsPhilippe C. Adell
Harry A. Atwater
Harry A. Atwater
ExaminesMALEVIC, DJURA
Art Unit2884
Technology Center2800
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