Optical systems and methods of characterizing high-k dielectrics | Patent Application Number 17147371

17147371
Not Appealed
Patent NumberUS 11808706 B2
Publication NumberUS 20220003678 A1
Filled DateJan 12, 2021
Priority DateSep 3, 2015
Inventor/ApplicantsPhilippe C. Adell
Harry A. Atwater
ExaminesMALEVIC, DJURA
Art Unit2884
Technology Center2800
Assignments
California Institute Of Technology
Current
California Institute Of Technology
Original
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