Staircase structure in three-dimensional memory device and method for forming the same | Patent Publication Number 20210384118
US 20210384118 A1Patent NumberUS 11450604 B2
Application Number16944835
Filled DateJul 31, 2020
Priority DateJun 5, 2020
Publication DateDec 9, 2021
Original AssigneeYangtze Memory Technologies Co. Ltd.
Current AssigneeYangtze Memory Technologies Co. Ltd.
Inventor/ApplicantsZhiliang Xia
Di Wang
Wenxi Zhou
Di Wang
Wenxi Zhou
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