Staircase structure in three-dimensional memory device and method for forming the same | Patent Number 11450604

US 11450604 B2
Application Number16944835
Publication NumberUS 20210384118 A1
Pendency2 years, 1 month, 21 days
Filled DateJul 31, 2020
Priority DateJun 5, 2020
Publication DateDec 9, 2021
Expiration DateJun 4, 2040
Inventor/ApplicantsZhiliang Xia
Di Wang
Wenxi Zhou
ExaminesLEE, HSIEN MING
Art Unit2814
Technology Center2800
Assignments
Yangtze Memory Technologies Co. Ltd.
Current
Yangtze Memory Technologies Co. Ltd.
Original
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