Staircase structure in three-dimensional memory device and method for forming the same | Patent Application Number 16944835

16944835
Not Appealed
Patent NumberUS 11450604 B2
Publication NumberUS 20210384118 A1
Filled DateJul 31, 2020
Priority DateJun 5, 2020
Inventor/ApplicantsZhiliang Xia
Di Wang
Wenxi Zhou
ExaminesLEE, HSIEN MING
Art Unit2814
Technology Center2800
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