Apparatus and methods for determining the position of a target structure on a substrate | Patent Publication Number 20210364936
US 20210364936 A1Patent NumberUS 11927891 B2
Application Number16963273
Filled DateDec 20, 2018
Priority DateDec 20, 2018
Publication DateNov 25, 2021
Original AssigneeAsml Holding
Current AssigneeAsml Netherlands B.v.
Inventor/ApplicantsDuygu Akbulut
Alessandro POLO
Alessandro Polo
Nitesh PANDEY
Sebastianus Adrianus GOORDEN
Duygu AKBULUT
Nitesh Pandey
Sebastianus Adrianus Goorden
Alessandro POLO
Alessandro Polo
Nitesh PANDEY
Sebastianus Adrianus GOORDEN
Duygu AKBULUT
Nitesh Pandey
Sebastianus Adrianus Goorden
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