Apparatus and methods for determining the position of a target structure on a substrate | Patent Number 11927891

US 11927891 B2
Application Number16963273
Publication NumberUS 20210364936 A1
Pendency5 years, 2 months, 24 days
Filled DateDec 20, 2018
Priority DateDec 20, 2018
Publication DateNov 25, 2021
Expiration DateDec 19, 2038
Inventor/ApplicantsDuygu Akbulut
Alessandro POLO
Alessandro Polo
Nitesh PANDEY
Sebastianus Adrianus GOORDEN
Duygu AKBULUT
Nitesh Pandey
Sebastianus Adrianus Goorden
ExaminesNGUYEN, LAM S
Art Unit2853
Technology Center2800
Assignments
Asml Netherlands B.v.
Current
Asml Netherlands B.v.Asml Holding
Original
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