Apparatus and methods for determining the position of a target structure on a substrate | Patent Application Number 16963273
16963273
Not Appealed
Patent NumberUS 11927891 B2
Publication NumberUS 20210364936 A1
Filled DateDec 20, 2018
Priority DateDec 20, 2018
Inventor/ApplicantsNitesh PANDEY
Alessandro POLO
Duygu Akbulut
Sebastianus Adrianus GOORDEN
Duygu AKBULUT
Alessandro Polo
Nitesh Pandey
Sebastianus Adrianus Goorden
Alessandro POLO
Duygu Akbulut
Sebastianus Adrianus GOORDEN
Duygu AKBULUT
Alessandro Polo
Nitesh Pandey
Sebastianus Adrianus Goorden
ExaminesNGUYEN, LAM S
Art Unit2853
Technology Center2800
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