Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article | Patent Publication Number 20190332016

US 20190332016 A1
Patent NumberUS 10539879 B2
Application Number16390262
Filled DateApr 22, 2019
Priority DateApr 22, 2019
Publication DateOct 31, 2019
Original AssigneeCanon Inc.
Current AssigneeCanon Inc.
Inventor/ApplicantsMasato Hagiri
Takeshi Nakajima
Mitsuru Seki
Satoshi Tomura
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