Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article | Patent Number 10539879

US 10539879 B2
Application Number16390262
Publication NumberUS 20190332016 A1
Pendency9 months, 4 days
Filled DateApr 22, 2019
Priority DateApr 22, 2019
Publication DateOct 31, 2019
Expiration DateJan 21, 2024
Inventor/ApplicantsMasato Hagiri
Takeshi Nakajima
Mitsuru Seki
Satoshi Tomura
ExaminesKIM, PETER B
Art Unit2882
Technology Center2800
Assignments
Canon Inc.
Current
Canon Inc.
Original
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