Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article | Patent Application Number 16390262

16390262
Not Appealed
Patent NumberUS 10539879 B2
Publication NumberUS 20190332016 A1
Filled DateApr 22, 2019
Priority DateApr 22, 2019
Inventor/ApplicantsMasato Hagiri
Takeshi Nakajima
Mitsuru Seki
Satoshi Tomura
ExaminesKIM, PETER B
Art Unit2882
Technology Center2800
Assignments
Canon Inc.
Current
Canon Inc.
Original
Law Firm
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