Organometallic solution based high resolution patterning compositions and corresponding methods | Patent Publication Number 20160116839
US 20160116839 A1Patent NumberUS 10642153 B2
Application Number14920107
Filled DateOct 22, 2015
Priority DateOct 23, 2014
Publication DateApr 28, 2016
Original AssigneeInpria Corporation
Current AssigneeInpria Corporation
Inventor/ApplicantsStephen T. Meyers
Douglas A. Keszler
Alan J. Telecky
Michael K. Kocsis
Jeremy T. Anderson
Joseph Burton Edson
Kai Jiang
Brian J. Cardineau
Douglas A. Keszler
Alan J. Telecky
Michael K. Kocsis
Jeremy T. Anderson
Joseph Burton Edson
Kai Jiang
Brian J. Cardineau
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