Organometallic solution based high resolution patterning compositions and corresponding methods | Patent Number 10642153
US 10642153 B2Filled DateOct 22, 2015
Priority DateOct 23, 2014
Publication DateApr 28, 2016
Expiration DateOct 22, 2034
Inventor/ApplicantsStephen T. Meyers
Douglas A. Keszler
Alan J. Telecky
Brian J. Cardineau
Michael K. Kocsis
Jeremy T. Anderson
Kai Jiang
Joseph Burton Edson
Douglas A. Keszler
Alan J. Telecky
Brian J. Cardineau
Michael K. Kocsis
Jeremy T. Anderson
Kai Jiang
Joseph Burton Edson
ExaminesCHACKO DAVIS, DABORAH
Art Unit1737
Technology Center1700
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