Organometallic solution based high resolution patterning compositions and corresponding methods | Patent Number 10642153

US 10642153 B2
Application Number14920107
Publication NumberUS 20160116839 A1
Pendency4 years, 6 months, 17 days
Filled DateOct 22, 2015
Priority DateOct 23, 2014
Publication DateApr 28, 2016
Expiration DateOct 22, 2034
Inventor/ApplicantsStephen T. Meyers
Douglas A. Keszler
Alan J. Telecky
Brian J. Cardineau
Michael K. Kocsis
Jeremy T. Anderson
Kai Jiang
Joseph Burton Edson
ExaminesCHACKO DAVIS, DABORAH
Art Unit1737
Technology Center1700
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