MEMS actuator and MEMS actuated shutter mechanism | Patent Publication Number 20130021656
US 20130021656 A1Patent NumberUS 08724201 B2
Application Number13187185
Filled DateJul 20, 2011
Priority DateJul 20, 2011
Publication DateJan 24, 2013
Original Assignee
Current Assignee
Inventor/ApplicantsEdward Tang
Brian Albus
EDWARD TANG
BRIAN ALBUS
Brian Albus
EDWARD TANG
BRIAN ALBUS
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