MEMS actuator and MEMS actuated shutter mechanism | Patent Number 08724201

US 08724201 B2
Application Number13187185
Publication NumberUS 20130021656 A1
Pendency2 years, 9 months, 28 days
Filled DateJul 20, 2011
Priority DateJul 20, 2011
Publication DateJan 24, 2013
Expiration DateMay 13, 2022
Inventor/ApplicantsEdward Tang
Brian Albus
EDWARD TANG
BRIAN ALBUS
ExaminesFONT, FRANK G
Art Unit2872
Technology Center2800
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