MEMS actuator and MEMS actuated shutter mechanism | Patent Application Number 13187185

13187185
Not Appealed
Patent NumberUS 08724201 B2
Publication NumberUS 20130021656 A1
Filled DateJul 20, 2011
Priority DateJul 20, 2011
Inventor/ApplicantsEdward Tang
Brian Albus
EDWARD TANG
BRIAN ALBUS
ExaminesFONT, FRANK G
Art Unit2872
Technology Center2800
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