High repetition rate gas discharge laser with precise pulse timing control | Patent Publication Number 20040047386
US 20040047386 A1Patent NumberUS 07149234 B2
Application Number10650578
Filled DateAug 27, 2003
Priority DateJun 30, 2000
Publication DateMar 11, 2004
Original AssigneeCymer Inc.
Current AssigneeCymer Inc.
Inventor/ApplicantsStuart L. Anderson
William N. Partlo
Palash P. Das
Jennan Yu
Tobias Pflanz
Brett D. Smith
Claus Strowitzki
Helmut Schillinger
Stephan Geiger
Claus Strowitzki
William N. Partlo
Stephan Geiger
Tobias Pflanz
Stuart L. Anderson
Claudia A. Hartmann
Helmut Schillinger
Claudia A. Hartmann
Jennan Yu
Palash P. Das
Brett D. Smith
William N. Partlo
Palash P. Das
Jennan Yu
Tobias Pflanz
Brett D. Smith
Claus Strowitzki
Helmut Schillinger
Stephan Geiger
Claus Strowitzki
William N. Partlo
Stephan Geiger
Tobias Pflanz
Stuart L. Anderson
Claudia A. Hartmann
Helmut Schillinger
Claudia A. Hartmann
Jennan Yu
Palash P. Das
Brett D. Smith
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