High repetition rate gas discharge laser with precise pulse timing control | Patent Publication Number 20040047386
US 20040047386 A1Patent NumberUS 07149234 B2
Application Number10650578
Filled DateAug 27, 2003
Priority DateJun 30, 2000
Publication DateMar 11, 2004
Original AssigneeCymer Inc.
Current AssigneeCymer Inc.
Inventor/ApplicantsStephan Geiger
Claus Strowitzki
Claus Strowitzki
Jennan Yu
Stephan Geiger
Claudia A. Hartmann
Brett D. Smith
Brett D. Smith
Palash P. Das
Claudia A. Hartmann
Jennan Yu
Tobias Pflanz
Stuart L. Anderson
Helmut Schillinger
William N. Partlo
Palash P. Das
Helmut Schillinger
William N. Partlo
Stuart L. Anderson
Tobias Pflanz
Claus Strowitzki
Claus Strowitzki
Jennan Yu
Stephan Geiger
Claudia A. Hartmann
Brett D. Smith
Brett D. Smith
Palash P. Das
Claudia A. Hartmann
Jennan Yu
Tobias Pflanz
Stuart L. Anderson
Helmut Schillinger
William N. Partlo
Palash P. Das
Helmut Schillinger
William N. Partlo
Stuart L. Anderson
Tobias Pflanz
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