High repetition rate gas discharge laser with precise pulse timing control | Patent Number 07149234

US 07149234 B2
Application Number10650578
Publication NumberUS 20040047386 A1
Pendency3 years, 3 months, 18 days
Filled DateAug 27, 2003
Priority DateJun 30, 2000
Publication DateMar 11, 2004
Expiration DateJun 30, 2020
Inventor/ApplicantsStuart L. Anderson
William N. Partlo
Palash P. Das
Jennan Yu
Tobias Pflanz
Brett D. Smith
Claus Strowitzki
Helmut Schillinger
Stephan Geiger
Claus Strowitzki
William N. Partlo
Stephan Geiger
Tobias Pflanz
Stuart L. Anderson
Claudia A. Hartmann
Helmut Schillinger
Claudia A. Hartmann
Jennan Yu
Palash P. Das
Brett D. Smith
ExaminesVANNUCCI, JAMES
Art Unit2828
Technology Center2800
Assignments
Cymer Inc.
Current
Cymer Inc.
Original
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