High repetition rate gas discharge laser with precise pulse timing control | Patent Application Number 10650578
10650578
Not Appealed
Patent NumberUS 07149234 B2
Publication NumberUS 20040047386 A1
Filled DateAug 27, 2003
Priority DateJun 30, 2000
Inventor/ApplicantsStuart L. Anderson
William N. Partlo
Palash P. Das
Jennan Yu
Tobias Pflanz
Brett D. Smith
Claus Strowitzki
Helmut Schillinger
Stephan Geiger
Claus Strowitzki
William N. Partlo
Stephan Geiger
Tobias Pflanz
Stuart L. Anderson
Claudia A. Hartmann
Helmut Schillinger
Claudia A. Hartmann
Jennan Yu
Palash P. Das
Brett D. Smith
William N. Partlo
Palash P. Das
Jennan Yu
Tobias Pflanz
Brett D. Smith
Claus Strowitzki
Helmut Schillinger
Stephan Geiger
Claus Strowitzki
William N. Partlo
Stephan Geiger
Tobias Pflanz
Stuart L. Anderson
Claudia A. Hartmann
Helmut Schillinger
Claudia A. Hartmann
Jennan Yu
Palash P. Das
Brett D. Smith
ExaminesVANNUCCI, JAMES
Art Unit2828
Technology Center2800
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