Through silicon via structure, method of formation, and integration in semiconductor substrate | Patent Number 09147609

US 09147609 B2
Application Number13415744
Publication NumberUS 20130087893 A1
Pendency3 years, 6 months, 25 days
Filled DateMar 8, 2012
Priority DateOct 7, 2011
Publication DateApr 11, 2013
Expiration DateOct 6, 2031
Inventor/ApplicantsDavid J. Howard
Hadi Jebory
ExaminesBACHNER, ROBERT G
Art Unit2898
Technology Center2800
Law Firm
You must be logged in to view
Login
Attorneys
Subscription-Only
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.