Piezo-actuated MEMS resonator with reduced nonlinear tcf | Patent Publication Number 20240223151

US 20240223151 A1
Patent NumberUS 12166464 B2
Application Number18402488
Filled DateJan 2, 2024
Priority Date-
Publication DateJul 4, 2024
Original AssigneeSitime Corporation
Current AssigneeSitime Corporation
Inventor/ApplicantsJoseph C. Doll
Charles I. Grosjean
Ginel C. Hill
Nicholas Miller
Paul M. Hagelin
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