Piezo-actuated MEMS resonator with reduced nonlinear tcf | Patent Application Number 18402488

18402488
Not Appealed
Patent NumberUS 12166464 B2
Publication NumberUS 20240223151 A1
Filled DateJan 2, 2024
Priority Date-
Inventor/ApplicantsJoseph C. Doll
Charles I. Grosjean
Ginel C. Hill
Nicholas Miller
Paul M. Hagelin
Examines-
Art Unit0
Technology Center0
Assignments
Sitime Corporation
Current
Sitime Corporation
Original
Law Firm
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