Apparatus for aligning device having fine pitch, apparatus for testing device having fine pitch, and device alignment method | Patent Publication Number 20230003793

US 20230003793 A1
Patent NumberUS 11982708 B2
Application Number17783942
Filled DateNov 3, 2020
Priority DateNov 3, 2020
Publication DateJan 5, 2023
Original AssigneeAmt Group Llc
Current AssigneeAmt Group Llc
Inventor/ApplicantsDu Chul KIM
Wan Gu LEE
Wan Gu Lee
Du Chul Kim
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