Apparatus for aligning device having fine pitch, apparatus for testing device having fine pitch, and device alignment method | Patent Number 11982708

US 11982708 B2
Application Number17783942
Publication NumberUS 20230003793 A1
Pendency3 years, 6 months, 13 days
Filled DateNov 3, 2020
Priority DateNov 3, 2020
Publication DateJan 5, 2023
Expiration DateNov 2, 2040
Inventor/ApplicantsDu Chul KIM
Wan Gu LEE
Wan Gu Lee
Du Chul Kim
ExaminesMCDONNOUGH, COURTNEY G
Art Unit2858
Technology Center2800
Assignments
Amt Group Llc
Current
Amt Group Llc
Original
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