Apparatus for processing substrate and method of transferring substrate | Patent Publication Number 20220301921

US 20220301921 A1
Patent NumberUS 11961758 B2
Application Number17653889
Filled DateMar 8, 2022
Priority DateMar 8, 2022
Publication DateSep 22, 2022
Original AssigneeTokyo Electron Limited
Current AssigneeTokyo Electron Limited
Inventor/ApplicantsTakehiro Shindo
Takehiro SHINDO
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