Apparatus for processing substrate and method of transferring substrate | Patent Application Number 17653889
17653889
Not Appealed
Patent NumberUS 11961758 B2
Publication NumberUS 20220301921 A1
Filled DateMar 8, 2022
Priority DateMar 8, 2022
Inventor/ApplicantsTakehiro Shindo
Takehiro SHINDO
Takehiro SHINDO
ExaminesLOWE, MICHAEL S
Art Unit3652
Technology Center3600
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