Reticle storage pod and method for securing reticle | Patent Publication Number 20220291596
US 20220291596 A1Patent NumberUS 11822257 B2
Application Number17684879
Filled DateMar 2, 2022
Priority DateMar 12, 2021
Publication DateSep 15, 2022
Original AssigneeGudeng Precision Industrial Co. Ltd.
Current AssigneeGudeng Precision Industrial Co. Ltd.
Inventor/ApplicantsMing-Chien Chiu
Hsin-Min Hsueh
Chia-Ho Chuang
Hsing-Min Wen
Hsin-Min Hsueh
Chia-Ho Chuang
Hsing-Min Wen
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