Reticle storage pod and method for securing reticle | Patent Publication Number 20220291596

US 20220291596 A1

Patent NumberUS 11822257 B2

Application Number17684879

Filled DateMar 2, 2022

Priority DateMar 12, 2021

Publication DateSep 15, 2022

Original AssigneeGudeng Precision Industrial Co. Ltd.

Current AssigneeGudeng Precision Industrial Co. Ltd.

Inventor/ApplicantsChia-Ho Chuang
Hsin-Min Hsueh
Ming-Chien Chiu
Hsing-Min Wen

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