Reticle storage pod and method for securing reticle | Patent Publication Number 20220291596

US 20220291596 A1
Patent NumberUS 11822257 B2
Application Number17684879
Filled DateMar 2, 2022
Priority DateMar 12, 2021
Publication DateSep 15, 2022
Inventor/ApplicantsChia-Ho Chuang
Hsin-Min Hsueh
Ming-Chien Chiu
Hsing-Min Wen
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