Reticle storage pod and method for securing reticle | Patent Application Number 17684879

17684879
Not Appealed
Patent NumberUS 11822257 B2
Publication NumberUS 20220291596 A1
Filled DateMar 2, 2022
Priority DateMar 12, 2021
Inventor/ApplicantsChia-Ho Chuang
Hsin-Min Hsueh
Ming-Chien Chiu
Hsing-Min Wen
ExaminesASFAW, MESFIN T
Art Unit2882
Technology Center2800
Assignments
Gudeng Precision Industrial Co. Ltd.
Current
Gudeng Precision Industrial Co. Ltd.
Original
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