Method of forming tungsten film and system therefor | Patent Publication Number 20220290294

US 20220290294 A1
Patent NumberUS 11840759 B2
Application Number17653690
Filled DateMar 7, 2022
Priority DateMar 7, 2022
Publication DateSep 15, 2022
Original AssigneeTokyo Electron Limited
Current AssigneeTokyo Electron Limited
Inventor/ApplicantsTsuyoshi Takahashi
Masafumi Takahashi
Masaki SANO
Masafumi TAKAHASHI
Kenji SUZUKI
Tsuyoshi TAKAHASHI
Kenji Suzuki
Masaki Sano
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