Method of forming tungsten film and system therefor | Patent Application Number 17653690
17653690
Not Appealed
Patent NumberUS 11840759 B2
Publication NumberUS 20220290294 A1
Filled DateMar 7, 2022
Priority DateMar 7, 2022
Inventor/ApplicantsKenji Suzuki
Masaki Sano
Masafumi TAKAHASHI
Tsuyoshi TAKAHASHI
Masafumi Takahashi
Masaki SANO
Kenji SUZUKI
Tsuyoshi Takahashi
Masaki Sano
Masafumi TAKAHASHI
Tsuyoshi TAKAHASHI
Masafumi Takahashi
Masaki SANO
Kenji SUZUKI
Tsuyoshi Takahashi
ExaminesTSCHEN, FRANCISCO W
Art Unit1712
Technology Center1700
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