Method of forming tungsten film and system therefor | Patent Application Number 17653690

17653690
Not Appealed
Patent NumberUS 11840759 B2
Publication NumberUS 20220290294 A1
Filled DateMar 7, 2022
Priority DateMar 7, 2022
Inventor/ApplicantsTsuyoshi Takahashi
Masafumi Takahashi
Masaki SANO
Masafumi TAKAHASHI
Kenji SUZUKI
Tsuyoshi TAKAHASHI
Kenji Suzuki
Masaki Sano
ExaminesTSCHEN, FRANCISCO W
Art Unit1712
Technology Center1700
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
Law Firm
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