Dual-frequency, direct-drive inductively coupled plasma source | Patent Publication Number 20220199365

US 20220199365 A1

Patent NumberUS 12165841 B2

Application Number17606686

Filled DateApr 24, 2020

Priority DateApr 30, 2019

Publication DateJun 23, 2022

Original AssigneeLam Research

Current AssigneeLam Research

Inventor/ApplicantsYuhou Wang
Alexander Miller Paterson
Maolin Long

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