Dual-frequency, direct-drive inductively coupled plasma source | Patent Application Number 17606686

17606686
Not Appealed
Patent NumberUS 12165841 B2
Publication NumberUS 20220199365 A1
Filled DateApr 24, 2020
Priority DateApr 30, 2019
Inventor/ApplicantsYuhou Wang
Alexander Miller Paterson
Maolin Long
ExaminesCULBERT, ROBERTS P
Art Unit1716
Technology Center1700
Assignments
Lam Research
Current
Lam Research
Original
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