Apparatus and method for handling wafer carrier doors | Patent Publication Number 20220189792
US 20220189792 A1Patent NumberUS 11784073 B2
Application Number17686278
Filled DateMar 3, 2022
Priority DateAug 30, 2017
Publication DateJun 16, 2022
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsTsung-Sheng KUO
Vic Huang
Jiun-Rong Pai
Hsu-Shui LIU
Alan YANG
Hsu-Shui Liu
Vic HUANG
Tsung-Sheng Kuo
Alan Yang
Yang-Ann CHU
Jiun-Rong PAI
Yang-Ann Chu
Vic Huang
Jiun-Rong Pai
Hsu-Shui LIU
Alan YANG
Hsu-Shui Liu
Vic HUANG
Tsung-Sheng Kuo
Alan Yang
Yang-Ann CHU
Jiun-Rong PAI
Yang-Ann Chu
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