Apparatus and method for handling wafer carrier doors | Patent Application Number 17686278

17686278
Not Appealed
Patent NumberUS 11784073 B2
Publication NumberUS 20220189792 A1
Filled DateMar 3, 2022
Priority DateAug 30, 2017
Inventor/ApplicantsTsung-Sheng KUO
Vic Huang
Jiun-Rong Pai
Hsu-Shui LIU
Alan YANG
Hsu-Shui Liu
Vic HUANG
Tsung-Sheng Kuo
Alan Yang
Yang-Ann CHU
Jiun-Rong PAI
Yang-Ann Chu
ExaminesJOERGER, KAITLIN S
Art Unit3652
Technology Center3600
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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