Identification of and compensation for a failure in a heater array | Patent Publication Number 20210384053

US 20210384053 A1

Patent NumberUS 12165891 B2

Application Number17285900

Filled DateOct 25, 2019

Priority DateOct 31, 2018

Publication DateDec 9, 2021

Original AssigneeLam Research

Current AssigneeLam Research

Inventor/ApplicantsChangyou Jing

Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Check our Latest Report Purchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.