Identification of and compensation for a failure in a heater array | Patent Application Number 17285900

17285900
Not Appealed
Patent NumberUS 12165891 B2
Publication NumberUS 20210384053 A1
Filled DateOct 25, 2019
Priority DateOct 31, 2018
Inventor/ApplicantsChangyou Jing
ExaminesTHONG, YEONG JUEN
Art Unit3761
Technology Center3700
Assignments
Lam Research
Current
Lam Research
Original
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