Stress sensor and manufacturing method therefor | Patent Publication Number 20210278292
US 20210278292 A1Patent NumberUS 11959815 B2
Application Number17329675
Filled DateMay 25, 2021
Priority DateNov 29, 2019
Publication DateSep 9, 2021
Original AssigneeMurata Manufacturing Co. Ltd.
Tokyo University
Tokyo University
Current AssigneeMurata Manufacturing Co. Ltd.
Tokyo University
Tokyo University
Inventor/ApplicantsDaichi Chiba
Akira Ando
Akira Ando
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