Stress sensor and manufacturing method therefor | Patent Number 11959815
US 11959815 B2Filled DateMay 25, 2021
Priority DateNov 29, 2019
Publication DateSep 9, 2021
Expiration DateNov 28, 2039
Inventor/ApplicantsDaichi Chiba
Akira Ando
Akira Ando
ExaminesROYSTON, JOHN M
Art Unit2855
Technology Center2800
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