End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Patent Publication Number 20200361094

US 20200361094 A1
Patent NumberUS 11515127 B2
Application Number15930924
Filled DateMay 13, 2020
Priority DateMay 14, 2019
Publication DateNov 19, 2020
Original AssigneeMattson Technology
Beijing Etown Semiconductor Technology Co. Ltd.
Current AssigneeMattson Technology
Beijing Etown Semiconductor Technology Co. Ltd.
Inventor/ApplicantsPeter J. Lembesis
Martin L. Zucker
Ryan M. Pakulski
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