End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Patent Number 11515127

US 11515127 B2
Application Number15930924
Publication NumberUS 20200361094 A1
Pendency2 years, 6 months, 20 days
Filled DateMay 13, 2020
Priority DateMay 14, 2019
Publication DateNov 19, 2020
Expiration DateMay 13, 2039
Inventor/ApplicantsPeter J. Lembesis
Martin L. Zucker
Ryan M. Pakulski
ExaminesVU, STEPHEN A
Art Unit3651
Technology Center3600
Assignments
Mattson Technology
Current
Beijing Etown Semiconductor Technology Co. Ltd.
Current
Mattson Technology
Original
Beijing Etown Semiconductor Technology Co. Ltd.
Original
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