Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination | Patent Publication Number 20180031470

US 20180031470 A1
Patent NumberUS 10337991 B2
Application Number15115752
Filled DateJun 1, 2016
Priority DateDec 8, 2015
Publication DateFeb 1, 2018
Original AssigneeKla Corporation
Current AssigneeKla Corporation
Inventor/ApplicantsVladimir Levinski
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